Abstract:
High cleanness criteria of chip plant have relatively high requirements for engineering construction. The design of an integrated circuit plant adopts densely-perforated floor slab, raised floor, epoxy self-leveling floor construction and epoxy emulsion paint inner wall construction. Measures are designed to optimize the installation construction of air-conditioning system and pipeline system, so as to guarantee the control effect of high cleanness. The cleanness control and construction technique of this engineering provides references for similar engineering.